Surface Modification of Gallium Arsenide by Electrochemical Methods in Different Electrolyte Compositions

نویسندگان

چکیده

We present the study of n-GaAs surface modification by electrochemical etching in different electrolyte compositions. The possibility forming micromorphology types on identical GaAs samples, particular crystallographic, defective-dislocation, and isotope interfaces, was investigated.

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ژورنال

عنوان ژورنال: Chemistry and Chemical Technology

سال: 2023

ISSN: ['1996-4196']

DOI: https://doi.org/10.23939/chcht17.02.262